O O O O O O O O

O O O O O O O O

O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O Initial CZ wafer O O O O O O O O O O O

O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O

O O O OO O O O O O O O O O O O O O O O O2 O2 O O O O O O O O O O O O O O O OO O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O

O O O O O O O O O O O O O O O O High temperature annealing O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O2 O O O O O2 O O O O O O2 O2 O O O O O O O O O O O O O2 O2

O O O O O O O O O O O O O O O2 O2 O O O O O O2 O O O O O O O2 O2 O O O O O O O O2 O2 O2 O2 O2 O2 O2 O2 O2 O2 O2 O2 O2 denuded zone O O O O O O O O O O O O O O O O O O O O O O O O O

O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O High temperature annealing O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O

O O O O O O O O O O O O O O O OO O O O O O O O O O O O O O O O O O O denuded zone O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O

O O O O O O O O O O O O O O Nucleation at low temperature O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O OO O

O O O O O O O O O O O O O O O O O denuded zone Distribution of nuclei sizes denuded zone Precipitate growth at moderate temperature denuded zone Growth of crystal defects (dislocations) M M M M M M M denuded zone Rapid diffusion of metal contamination M M denuded zone M M M M Gettering M denuded zone O O O O O O O O O O O O O O O O O O O O O M O O O O O O O OO O O O O O O M O

OM O O O O O O O O O O O O O O O O O O O O O O MO O O MO O O O O O O O O O O O O O O O O O O O O O O O O O O M M O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O Release of contaminants due to late high temperature anneal

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